Axcelis has shipped a Purion H200 SiC ion implant system to SiC specialist Wolfspeed. The evaluation system will be used to support the production of power devices for EV applications.
» Evertiq
Axcelis has shipped a Purion H200 SiC ion implant system to SiC specialist Wolfspeed. The evaluation system will be used to support the production of power devices for EV applications.
» Evertiq